Directional acoustic response of a silicon disc-based microelectromechanical systems structure
نویسندگان
چکیده
David James Mackie1, Joseph Curt Jackson1, James Gordon Brown2, Deepak Uttamchandani2, James Frederick Charles Windmill1 Department of Electronic and Electrical Engineering, Centre for Ultrasonic Engineering, University of Strathclyde, Glasgow G1 1XW, United Kingdom Department of Electronic and Electrical Engineering, Centre for Microsystems and Photonics, University of Strathclyde, Glasgow G1 1XW, United Kingdom E-mail: [email protected]
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